@misc{SpindlerHeroldAckeretal.2017, author = {Mario Spindler and Steven Herold and J{\"o}rg Acker and Erik Brachmann and Steffen Oswald and Siegfried Menzel and Gerd Rane}, title = {Chemical etching of Tungsten thin films for high-temperature surface acoustic wave-based sensor devices}, booktitle = {Thin Solid Films}, volume = {612}, doi = {10.1016/j.tsf.2016.04.035}, url = {http://www.sciencedirect.com/science/article/pii/S004060901630116X}, institution = {FG Physikalische Chemie}, type = {articler}, pages = {322 -- 326}, year = {2017}, }