TY - GEN A1 - Jung, Denis A1 - Drabe, Christian A1 - Schenk, Harald A1 - Sandner, Thilo A1 - Klose, Thomas A1 - Wolter, Alexander T1 - Method for generating a micromechanical structure Y1 - 2016 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/15977 ER -