@inproceedings{SandnerGrashoffSchwarzenbergetal.2015, author = {Thilo Sandner and Thomas Grashoff and Markus Schwarzenberg and R. Schroedter and Harald Schenk}, title = {Quasi-static microscanner with linearized raster scanning for an adaptive 3D-laser camera}, booktitle = {SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014}, pages = {897717-1 -- 897717-9}, year = {2015}, }