TY - CONF A1 - Schenk, Harald A1 - Wagner, Michael A1 - Grahmann, Jan A1 - Merten, André A2 - Kye, Jongwook A2 - Owa, Soichi T1 - Advances in MOEMS technologies for high quality imaging systems T2 - Optical Microlithography XXXI, 27 February-1 March 2018, San Jose, California, Unites States N2 - An overview of advances in MOEMS devices and technologies for high quality imaging systems is provided. A particular focus is laid on recent technological further developments possibly opening gateways to unprecedented device and system functionality by e. g.: increase of pixel count towards higher parallel operation, decrease of the mirror pitch in large arrays towards applications like high-performance holography, novel technologies for higher operation bandwidth, increase of aperture size for scanning applications like LIDAR, integration of high reflection coatings for processing of multi Watt laser radiation for marking and engraving, and phased arrays for high speed laser beam steering. Y1 - 2019 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/23063 SN - 978-1-5106-1666-0 SN - 978-1-5106-1667-7 PB - SPIE CY - Bellingham, Washington ER -