@inproceedings{SchenkWagnerGrahmannetal.2019, author = {Harald Schenk and Michael Wagner and Jan Grahmann and Andr{\´e} Merten}, title = {Advances in MOEMS technologies for high quality imaging systems}, booktitle = {Optical Microlithography XXXI, 27 February-1 March 2018, San Jose, California, Unites States}, editor = {Jongwook Kye and Soichi Owa}, doi = {10.1117/12.2297399}, year = {2019}, }