@misc{SchenkGrahmannWagneretal.2017, author = {Harald Schenk and Jan Grahmann and Hans-Joachim Wagner and Ralf Ostendorf and Marcel Rattunde}, title = {Mikromechanisches System zum Durchstimmen von Lasern (Micromechanical system for tuning of lasers)}, institution = {FG Mikro- und Nanosysteme}, type = {patent}, year = {2017}, }