@misc{SalvalaglioBergamaschiniIsaetal.2016, author = {Marco Salvalaglio and Roberto Bergamaschini and Fabio Isa and Andrea Scaccabarozi and Giovanni Isella and Rainer Backofen and Axel Voigt and Francesco Montalenti and Giovanni Capellini and Anna Marzegalli and Thomas Schroeder and Hans von K{\"a}nel and Leo Miglio}, title = {Engineering coalescence by annealing of 3D Ge microstructures into high-qualtiy suspended layers on Si}, booktitle = {ACS Applied Materials and Interfaces}, volume = {7}, number = {34}, issn = {1944-8244}, doi = {10.1021/acsami.5b05054}, institution = {FG Halbleitermaterialien}, type = {articler}, pages = {19219 -- 19225}, year = {2016}, }