TY - GEN A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Schenk, Harald A1 - Uhlig, Sebastian T1 - Micromechanical devices with mechanical actuators Y1 - 2024 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/32681 UR - https://www.freepatentsonline.com/11639718.html ER -