TY - CONF A1 - Uhlig, Sebastian A1 - Gaudet, Matthieu A1 - Langa, Sergiu A1 - Schimmanz, Klaus A1 - Conrad, Holger A1 - Kaiser, Bert A1 - Schenk, Harald T1 - Electrostatically in-plane driven silicon micropump for modular configuration T2 - Conference proceedings, The 3rd Conference on MicroFluidic Handling Systems (MFHS 2017), 4 - 6 October 2017, Enschede, The Netherlands Y1 - 2019 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/23059 UR - http://publica.fraunhofer.de/dokumente/N-477736.html SP - 57 EP - 60 PB - University of Twente CY - Enschede ER -