@inproceedings{GaudetUhligStolzetal.2018, author = {Matthieu Gaudet and Sebastian Uhlig and Michael Stolz and S. Arscott and Holger Conrad and Sergiu Langa and Bert Kaiser and Harald Schenk}, title = {Electrostatic bending actuators with liquid filled nanometer scale gap}, booktitle = {MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017}, pages = {175 -- 178}, url = {http://ieeexplore.ieee.org/document/7863369/}, year = {2018}, }