TY - CONF A1 - Schmeißer, Dieter A1 - Zheng, Fan A1 - Himpsel, Franz J. A1 - Engelmann, Hans-Jürgen A1 - Zschech, Ehrenfried T1 - Silicate Formation at the Interface of High-k Dielectrics and Si(001) Surfaces Y1 - 2007 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/3593 ER -