@inproceedings{HeimFriedrichGuttmannetal.2011, author = {S. Heim and Daniel Friedrich and P. Guttmann and S. Rehbein and Dmytro Chumakov and Y. Ritz and G. Schneider and Dieter Schmeißer and Ehrenfried Zschech}, title = {Dynamical X-ray Microscopy Study of Stress-Induced Voiding in Cu Interconnects}, url = {http://link.aip.org/link/?APCPCS/1143/20/1}, year = {2011}, }