@inproceedings{HoffmannSchmeisserHimpseletal.2015, author = {Patrick Hoffmann and Dieter Schmeißer and Franz J. Himpsel and Hans-J{\"u}rgen Engelmann and Ehrenfried Zschech and Heiko Stegmann and Jonathan D. Denlinger}, title = {Characterization of Chemical Bonding in Low-K Dielectric Materials for Interconnect Isolation: XAS and EELS Study}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 41}, pages = {S. 156}, year = {2015}, }