@misc{DudekLupinaKozłowskietal.2011, author = {Piotr T. Dudek and Grzegorz Lupina and Grzegorz Kozłowski and Peter Zaumseil and Jakob Bauer and Oksana Fursenko and Jarek Marek Dabrowski and R. Schmidt and Gunther Lippert and Hans-Joachim M{\"u}ssig and Thomas Schr{\"o}der and Dieter Schmeißer and Ehrenfried Zschech}, title = {Atomic-scale engineering of future high-k dynamic random access memory dielectrics: The example of partial Hf substitution by Ti in BaHfO3}, booktitle = {Journal of Vacuum Science and Technology / B}, volume = {29}, number = {1}, issn = {2166-2754}, institution = {FG Angewandte Physik und Halbleiterspektroskopie}, type = {articler}, year = {2011}, }