TY - JOUR A1 - Schmeißer, Dieter A1 - Zschech, Ehrenfried T1 - Silicate Formation at the Interface of Hf-Oxide and Pr-Oxide as a High-k Dielectric and Si(001) surfaces Y1 - 2007 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/3601 ER -