@inproceedings{TallaridaDessmannStaedteretal.2015, author = {Massimo Tallarida and Nils Deßmann and Matthias St{\"a}dter and Daniel Friedrich and Marcel Michling and Dieter Schmeißer}, title = {Atomic layer deposition of TiO}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, url = {http://www.dpg-verhandlungen.de/year/2011/conference/dresden/part/ds/session/12/contribution/2}, year = {2015}, }