@article{BieniekBeckJakubowskietal.2011, author = {Tomasz Bieniek and Romuald B. Beck and Andrzej Jakubowski and Piotr Konarski and M. Cwil and Patrick Hoffmann and Dieter Schmeißer}, title = {Application of r.f. plasma ultrashallow nitrogen ion implantation for pedestal oxynitride layer formation}, year = {2011}, }