@article{SohalLupinaLippertetal.2011, author = {Rakesh Sohal and Grzegorz Lupina and Gunther Lippert and Christian Wenger and Olaf Seifarth and Thomas Schr{\"o}der and Massimo Tallarida and Dieter Schmeißer}, title = {Interface chemistry of high-k PrxAl2-xO3 (x=2-0) dielectrics on TiN for dynamic random access memory applications}, year = {2011}, }