@misc{KalettaWipfFraschkeetal.2016, author = {Udo Christian Kaletta and Christian Wipf and Mirko Fraschke and Dirk Wolansky and Markus Andreas Schubert and Thomas Schroeder and Christian Wenger}, title = {AlN/SiO2/Si3N4/Si(100) based CMOS compatible surface acoustic wave filter with -12.8 dB minimum insertion loss}, booktitle = {IEEE Transactions on Electron Devices}, volume = {62}, number = {3}, issn = {0018-9383}, doi = {10.1109/TED.2015.2395443}, institution = {FG Halbleitermaterialien}, type = {articler}, pages = {764 -- 768}, year = {2016}, }