@misc{MaiMarschmeyerPeczeketal.2022, author = {Christian Mai and Steffen Marschmeyer and Anna Peczek and Aleksandra Kroh and Josmy Jose and Sebastian Reiter and Inga Anita Fischer and Christian Wenger and Andreas Mai}, title = {Integration Aspects of Plasmonic TiN-based Nano-Hole-Arrays on Ge Photodetectorsin a 200mm Wafer CMOS Compatible Silicon Technology}, booktitle = {ECS Transactions}, volume = {109}, number = {4}, issn = {1938-5862}, doi = {10.1149/10904.0035ecst}, institution = {FG Experimentalphysik und funktionale Materialien}, type = {articler}, pages = {35 -- 46}, year = {2022}, }