@misc{MoralesMahmoodinezhadTschammeretal.2023, author = {Carlos Morales and Ali Mahmoodinezhad and Rudi Tschammer and Yuliia Kosto and Carlos Alvarado Chavarin and Markus Andreas Schubert and Christian Wenger and Karsten Henkel and Jan Ingo Flege}, title = {Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates}, booktitle = {Inorganics}, volume = {11}, number = {12}, issn = {2304-6740}, doi = {10.3390/inorganics11120477}, institution = {FG Angewandte Physik und Halbleiterspektroskopie}, type = {articler}, year = {2023}, }