@misc{HenkelTorcheSohaletal.2011, author = {Karsten Henkel and Mohamed Torche and Rakesh Sohal and Konstantin Karavaev and Yevgen Burkov and Carola Schwiertz and Dieter Schmeißer}, title = {Pr-O-Al-N dielectrics for metal insulator semiconductor stacks}, institution = {FG Angewandte Physik und Halbleiterspektroskopie}, type = {articler}, year = {2011}, }