TY - GEN A1 - Henkel, Karsten A1 - Burkov, Yevgen A1 - Karavaev, Konstantin A1 - Torche, Mohamed A1 - Schwiertz, Carola A1 - Schmeißer, Dieter T1 - Optimization of the AION buffer layer for PrxOy/Si stacks KW - AION buffer Y1 - 2011 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/5071 ER -