@inproceedings{BurkovHenkelSchmeisser2015, author = {Yevgen Burkov and Karsten Henkel and Dieter Schmeißer}, title = {X-ray photoemission spectroscopy of Aluminium Oxynitride on Si(001) and the rise as buffer layers}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 43}, pages = {S. 243}, url = {http://www.dpg-verhandlungen.de/year/2008/conference/berlin/part/ds/session/23/contribution/5}, year = {2015}, }