TY - GEN A1 - Schade, M. A1 - Varlamova, Olga A1 - Reif, Jürgen A1 - Blumtritt, Horst A1 - Erfurth, Wilfried A1 - Leipner, Hartmut S. T1 - High-resolution investigations of ripple structures formed by femtosecond laser irradiation of silicon Y1 - 2011 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/6071 ER -