@inproceedings{TallaridaHenkelGargourietal.2016, author = {Massimo Tallarida and Karsten Henkel and Hassan Gargouri and J{\"o}rg Haeberle and Bernd Gruska and Matthias Arens and Dieter Schmeißer}, title = {New opportunities with Plasma enhanced atomic layer deposition (PE-ALD) of oxides}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, url = {http://www.dpg-verhandlungen.de/year/2014/conference/dresden/part/ds/session/49/contribution/3?lang=en}, year = {2016}, }