@inproceedings{KahleUhligBauer2003, author = {Olaf Kahle and C. Uhlig and Monika Bauer}, title = {VTE - A new Method for Characterisation of Thin Film Properties}, booktitle = {Proceedings presented at POLYTRONIC 2001, Potsdam, Germany, October 21 - 24, 2001}, year = {2003}, }