TY - JOUR A1 - Kahle, Olaf A1 - Uhlig, C. A1 - Bauer, Monika T1 - The Advancement of Ellipsometry to the Nano-TMA/TGA/DVS - Method and Applications Y1 - 2008 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/3870 ER -