@misc{AckerLangnerMeineletal.2018, author = {J{\"o}rg Acker and Thomas Langner and Birgit Meinel and Tim Sieber}, title = {Saw Damage as an Etch Mask for the Acidic Texturization of Multicrystalline Silicon Wafers}, booktitle = {Materials Science in Semiconductor Processing}, volume = {74}, issn = {1369-8001}, doi = {10.1016/j.mssp.2017.09.039}, url = {https://www.sciencedirect.com/science/article/pii/S1369800117313896}, institution = {FG Physikalische Chemie}, type = {articler}, pages = {238 -- 248}, year = {2018}, }