TY - GEN A1 - Rietig, Anja A1 - Acker, Jörg T1 - Kinetic studies on acidic wet chemical etching of silicon in binary and ternary mixtures of HF, HNO3 and H2SiF6 T2 - Physical Chemistry Chemical Physics Y1 - 2023 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/31405 SN - 1463-9084 SN - 1463-9076 VL - 25 IS - 38 SP - 26245 EP - 26257 ER -