@misc{RietigAcker2023, author = {Anja Rietig and J{\"o}rg Acker}, title = {Kinetic studies on acidic wet chemical etching of silicon in binary and ternary mixtures of HF, HNO3 and H2SiF6}, booktitle = {Physical Chemistry Chemical Physics}, volume = {25}, number = {38}, issn = {1463-9084}, doi = {10.1039/d3cp03188h}, institution = {FG Physikalische Chemie}, type = {articler}, pages = {26245 -- 26257}, year = {2023}, }