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Burger, Sven (53)
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finite element method
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reduced basis method
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electromagnetic field solver
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optical metrology
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rigorous optical modeling
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adaptive sampling
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maxwell equation
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model reduction
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nano-photonics
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optical critical dimension metrology
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Numerical Mathematics (53)
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Determination of line profile on nanostructured surfaces using EUV and x-ray scattering
(2014)
Soltwisch, Victor
;
Wernecke, Jan
;
Haase, Anton
;
Probst, Jürgen
;
Schoengen, Max
;
Scholze, Frank
;
Pomplun, Jan
;
Burger, Sven
Finite Element Methods for Computational Nano-optics
(2012)
Burger, Sven
;
Pomplun, Jan
;
Schmidt, Frank
Reduced basis method for source mask optimization
(2010)
Pomplun, Jan
;
Zschiedrich, Lin
;
Burger, Sven
;
Schmidt, Frank
;
Tyminski, Jacek
;
Flagello, Donis
;
Toshiharu, N.
3D Finite-Element Simulations of Enhanced Light Transmission Through Arrays of Holes in Metal Films
(2009)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
;
Kettner, Benjamin
;
Lockau, D.
Finite element method for accurate 3D simulation of plasmonic waveguides
(2010)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
JCMsuite: An Adaptive FEM Solver for Precise Simulations in Nano-Optics
(2008)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
The influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks
(2007)
Scholze, Frank
;
Laubis, Christian
;
Dersch, Uwe
;
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
Reduced basis method for computational lithography
(2009)
Pomplun, Jan
;
Zschiedrich, Lin
;
Burger, Sven
;
Schmidt, Frank
Advanced FEM analysis of optical waveguides: algorithms and applications
(2008)
Schmidt, Frank
;
Burger, Sven
;
Pomplun, Jan
;
Zschiedrich, Lin
Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation
(2008)
Scholze, Frank
;
Laubis, Christian
;
Ulm, Gerhard
;
Dersch, Uwe
;
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
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