Reduced basis method for real-time inverse scatterometry
Author: | Jan Pomplun, Sven BurgerORCiD, Lin Zschiedrich, Frank Schmidt |
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Document Type: | In Proceedings |
Parent Title (English): | Modelling Aspects in Optical Metrology III |
Volume: | 8083 |
First Page: | 808308 |
Publisher: | Proc. SPIE |
Year of first publication: | 2011 |
DOI: | https://doi.org/10.1117/12.889892 |