Analytical modeling and 3D finite element simulation of line edge roughness in scatterometry
Author: | Akiko Kato, Sven BurgerORCiD, Frank Scholze |
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Document Type: | Article |
Parent Title (English): | Appl. Optics |
Volume: | 51 |
First Page: | 6457 |
Last Page: | 6464 |
Year of first publication: | 2012 |
ArXiv Id: | http://arxiv.org/abs/1208.4220 |
DOI: | https://doi.org/10.1364/AO.51.006457 |