EMF Simulations of Isolated and Periodic 3D Photomask Patterns
Author: | Sven BurgerORCiD, Lin Zschiedrich, Frank Schmidt, Roderick Köhle, Bernd Küchler, Christoph Nölscher |
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Document Type: | In Proceedings |
Parent Title (English): | Photomask Technology |
Volume: | 6730 |
First Page: | 6630 |
Publisher: | Proc. SPIE |
Year of first publication: | 2007 |
URL: | http://arxiv.org/pdf/0709.3934 |