TY - CHAP A1 - Soltwisch, Victor A1 - Wernecke, Jan A1 - Haase, Anton A1 - Probst, Jürgen A1 - Schoengen, Max A1 - Scholze, Frank A1 - Pomplun, Jan A1 - Burger, Sven T1 - Determination of line profile on nanostructured surfaces using EUV and x-ray scattering T2 - Proc. SPIE Y1 - 2014 U6 - https://doi.org/10.1117/12.2066165 VL - 9235 SP - 92351D ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Finite-element based electromagnetic field simulations: Benchmark results for isolated structures T2 - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2026213 VL - 8880 SP - 88801Z ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Rozova, Maria A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Finite element simulation of optical modes in VCSELs T2 - Numerical Simulation of Optoelectronic Devices (NUSOD), 11th International Conference on Y1 - 2011 U6 - https://doi.org/10.1109/NUSOD.2011.6041170 SP - 119 EP - 120 ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Pomplun, Jan A1 - Burger, Sven T1 - Finite elements for nano-optics applications T2 - Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM) Y1 - 2016 SN - 978-1-5108-4796-5 SP - 178 ER - TY - CHAP A1 - Tyminski, Jacek A1 - Pomplun, Jan A1 - Renwick, Stephen P. T1 - Impact of topographic mask models on scanner matching solutions T2 - Proc. SPIE: Optical Microlithography XXVII Y1 - 2014 U6 - https://doi.org/10.1117/12.2045919 VL - 9052 SP - 905218 ER - TY - JOUR A1 - Holzlöhner, Ronald A1 - Burger, Sven A1 - Roberts, P. A1 - Pomplun, Jan T1 - Efficient optimization of hollow-core photonic crystal fiber design using the finite-element method JF - J. Eur. Opt. Soc.-Rapid Y1 - 2006 U6 - https://doi.org/10.2971/jeos.2006.06011 VL - 1 SP - 06011 ER - TY - CHAP A1 - Kleemann, B. A1 - Kurz, J. A1 - Hetzler, J. A1 - Pomplun, Jan A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness T2 - Modelling Aspects in Optical Metrology III Y1 - 2011 U6 - https://doi.org/10.1117/12.889364 VL - 8083 SP - 808309 PB - Proc. SPIE ER - TY - JOUR A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Accelerated a posteriori error estimation for the reduced basis method with application to 3D electromagnetic scattering problems JF - SIAM J. Sci. Comput. Y1 - 2010 U6 - https://doi.org/10.1137/090760271 VL - 32 SP - 498 EP - 520 ER - TY - CHAP A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Reduced basis method for fast and robust simulation of electromagnetic scattering problems T2 - Numerical Methods in Optical Metrology Y1 - 2009 U6 - https://doi.org/10.1117/12.827588 VL - 7390 SP - 73900I PB - Proc. SPIE ER - TY - CHAP A1 - Pomplun, Jan A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schmidt, Frank T1 - Reduced basis method for computational lithography T2 - Photomask Technology Y1 - 2009 U6 - https://doi.org/10.1117/12.829639 VL - 7488 SP - 74882B PB - Proc. SPIE ER -