@inproceedings{SoltwischWerneckeHaaseetal.2014, author = {Soltwisch, Victor and Wernecke, Jan and Haase, Anton and Probst, J{\"u}rgen and Schoengen, Max and Scholze, Frank and Pomplun, Jan and Burger, Sven}, title = {Determination of line profile on nanostructured surfaces using EUV and x-ray scattering}, volume = {9235}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2066165}, pages = {92351D}, year = {2014}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2013, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {Finite-element based electromagnetic field simulations: Benchmark results for isolated structures}, volume = {8880}, booktitle = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1310.2732}, doi = {10.1117/12.2026213}, pages = {88801Z}, year = {2013}, language = {en} } @inproceedings{PomplunBurgerRozovaetal.2011, author = {Pomplun, Jan and Burger, Sven and Rozova, Maria and Zschiedrich, Lin and Schmidt, Frank}, title = {Finite element simulation of optical modes in VCSELs}, booktitle = {Numerical Simulation of Optoelectronic Devices (NUSOD), 11th International Conference on}, doi = {10.1109/NUSOD.2011.6041170}, pages = {119 -- 120}, year = {2011}, language = {en} } @inproceedings{ZschiedrichSchmidtPomplunetal.2016, author = {Zschiedrich, Lin and Schmidt, Frank and Pomplun, Jan and Burger, Sven}, title = {Finite elements for nano-optics applications}, booktitle = {Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM)}, isbn = {978-1-5108-4796-5}, pages = {178}, year = {2016}, language = {en} } @inproceedings{TyminskiPomplunRenwick2014, author = {Tyminski, Jacek and Pomplun, Jan and Renwick, Stephen P.}, title = {Impact of topographic mask models on scanner matching solutions}, volume = {9052}, booktitle = {Proc. SPIE: Optical Microlithography XXVII}, doi = {10.1117/12.2045919}, pages = {905218}, year = {2014}, language = {en} } @article{HolzloehnerBurgerRobertsetal.2006, author = {Holzl{\"o}hner, Ronald and Burger, Sven and Roberts, P. and Pomplun, Jan}, title = {Efficient optimization of hollow-core photonic crystal fiber design using the finite-element method}, volume = {1}, journal = {J. Eur. Opt. Soc.-Rapid}, doi = {10.2971/jeos.2006.06011}, pages = {06011}, year = {2006}, language = {en} } @inproceedings{KleemannKurzHetzleretal.2011, author = {Kleemann, B. and Kurz, J. and Hetzler, J. and Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness}, volume = {8083}, booktitle = {Modelling Aspects in Optical Metrology III}, publisher = {Proc. SPIE}, doi = {10.1117/12.889364}, pages = {808309}, year = {2011}, language = {en} } @article{PomplunSchmidt2010, author = {Pomplun, Jan and Schmidt, Frank}, title = {Accelerated a posteriori error estimation for the reduced basis method with application to 3D electromagnetic scattering problems}, volume = {32}, journal = {SIAM J. Sci. Comput.}, doi = {10.1137/090760271}, pages = {498 -- 520}, year = {2010}, language = {en} } @inproceedings{PomplunSchmidt2009, author = {Pomplun, Jan and Schmidt, Frank}, title = {Reduced basis method for fast and robust simulation of electromagnetic scattering problems}, volume = {7390}, booktitle = {Numerical Methods in Optical Metrology}, publisher = {Proc. SPIE}, doi = {10.1117/12.827588}, pages = {73900I}, year = {2009}, language = {en} } @inproceedings{PomplunZschiedrichBurgeretal.2009, author = {Pomplun, Jan and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank}, title = {Reduced basis method for computational lithography}, volume = {7488}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, doi = {10.1117/12.829639}, pages = {74882B}, year = {2009}, language = {en} }