@inproceedings{SoltwischWerneckeHaaseetal.2014, author = {Victor Soltwisch and Jan Wernecke and Anton Haase and J{\"u}rgen Probst and Max Schoengen and Frank Scholze and Jan Pomplun and Sven Burger}, title = {Determination of line profile on nanostructured surfaces using EUV and x-ray scattering}, booktitle = {Proc. SPIE}, volume = {9235}, pages = {92351D}, doi = {10.1117/12.2066165}, year = {2014}, }