@inproceedings{TyminskiPomplunRenwick2014, author = {Jacek Tyminski and Jan Pomplun and Stephen P. Renwick}, title = {Impact of topographic mask models on scanner matching solutions}, booktitle = {Proc. SPIE: Optical Microlithography XXVII}, volume = {9052}, pages = {905218}, doi = {10.1117/12.2045919}, year = {2014}, }