@article{SoltwischBurgerScholze2013, author = {Victor Soltwisch and Sven Burger and Frank Scholze}, title = {Scatterometry sensitivity analysis for conical diffraction versus in-plane diffraction geometry with respect to the side wall angle}, journal = {Proc. SPIE}, volume = {8789}, pages = {878905}, doi = {10.1117/12.2020487}, year = {2013}, }