@inproceedings{ZschiedrichBurgerSchaedleetal.2005, author = {Lin Zschiedrich and Sven Burger and Achim Sch{\"a}dle and Frank Schmidt}, title = {Domain decomposition method for electromagnetic scattering problems: application to EUV lithography}, booktitle = {Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic devices}, pages = {55 -- 56}, doi = {10.1109/NUSOD.2005.1518132}, year = {2005}, }