@inproceedings{PomplunBurgerSchmidtetal.2007, author = {Jan Pomplun and Sven Burger and Frank Schmidt and Frank Scholze and Christian Laubis and Uwe Dersch}, title = {Finite element analysis of EUV lithography}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Harald Bosse}, volume = {6617}, pages = {661718}, doi = {10.1117/12.726156}, year = {2007}, }