@inproceedings{PomplunBurgerSchmidtetal.2008, author = {Jan Pomplun and Sven Burger and Frank Schmidt and Frank Scholze and Christian Laubis and Uwe Dersch}, title = {Metrology of EUV masks by EUV-scatterometry and finite element analysis}, booktitle = {Photomask and Next-Generation Lithography Mask Technology XV}, editor = {Toshiyuki Horiuchi}, volume = {7028}, year = {2008}, }