@inproceedings{KleemannKurzHetzleretal.2011, author = {B. Kleemann and J. Kurz and J. Hetzler and Jan Pomplun and Sven Burger and Lin Zschiedrich and Frank Schmidt}, title = {Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness}, booktitle = {Modelling Aspects in Optical Metrology III}, volume = {8083}, pages = {808309}, doi = {10.1117/12.889364}, year = {2011}, }