@inproceedings{BurgerZschiedrichPomplunetal.2011, author = {Sven Burger and Lin Zschiedrich and Jan Pomplun and Frank Schmidt}, title = {Rigorous simulations of 3D patterns on extreme ultraviolet lithography masks}, booktitle = {Modelling Aspects in Optical Metrology III}, editor = {Bernd Bodermann}, volume = {8083}, pages = {80831B}, doi = {10.1117/12.889831}, year = {2011}, }