@inproceedings{BurgerZschiedrichSchmidtetal.2007, author = {Sven Burger and Lin Zschiedrich and Frank Schmidt and Roderick K{\"o}hle and Bernd K{\"u}chler and Christoph N{\"o}lscher}, title = {EMF Simulations of Isolated and Periodic 3D Photomask Patterns}, booktitle = {Photomask Technology}, volume = {6730}, pages = {6630}, url = {http://arxiv.org/pdf/0709.3934}, year = {2007}, }