@inproceedings{BodermannHansenBurgeretal.2012, author = {Bernd Bodermann and Poul-Erik Hansen and Sven Burger and Mark-Alexander Henn and Hermann Gross and Markus B{\"a}r and Frank Scholze and Johannes Endres and Matthias Wurm}, title = {First steps towards a scatterometry reference standard}, booktitle = {Proc. SPIE}, volume = {8466}, pages = {84660E}, doi = {10.1117/12.929903}, year = {2012}, }