TY - JOUR A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Blome, Mark A1 - Schmidt, Frank T1 - Advanced finite-element methods for design and analysis of nano-optical structures: Applications T2 - Proc. SPIE Y1 - 2013 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/2641 VL - 8642 SP - 864205 ER -