@inproceedings{PomplunZschiedrichBurgeretal.2009, author = {Jan Pomplun and Lin Zschiedrich and Sven Burger and Frank Schmidt}, title = {Reduced basis method for computational lithography}, booktitle = {Photomask Technology}, volume = {7488}, pages = {74882B}, doi = {10.1117/12.829639}, year = {2009}, }